{"id":763032,"date":"2020-06-01T10:00:00","date_gmt":"2020-06-01T14:00:00","guid":{"rendered":"https:\/\/www.prime-wow.com\/?p=763032"},"modified":"2020-06-01T10:00:00","modified_gmt":"2020-06-01T14:00:00","slug":"asmls-first-multi-beam-inspection-tool-for-5nm","status":"publish","type":"post","link":"https:\/\/www.prime-wow.com\/?p=763032","title":{"rendered":"ASML\u2019s First Multi-Beam Inspection Tool for 5nm"},"content":{"rendered":"<p align=\"center\"><a href=\"https:\/\/www.anandtech.com\/show\/15822\/asml-first-multibeam-inspection-tool-for-5nm\"><img decoding=\"async\" src=\"https:\/\/www.prime-wow.com\/wp-content\/uploads\/2020\/06\/HMI_575px.jpg\" alt=\"\" \/><\/a><\/p>\n<p \/>\n<p>ASML has announced it has made a significant development in its multi-beam inspectional tool line. The new eScan1000 moves a single beam scanning process into a nine-beam scanning process, which ASML claims increases the throughput of such tools by up to 600% for in-line defect inspection applications. This tool is suitable for all major process nodes in current production as well as 5nm and beyond.<\/p>\n<p>&#013;<br \/>\n&#013;<\/p>\n<p>\u00a0<\/p>\n<p>&#013;<\/p>\n<p align=\"center\"><a href=\"http:\/\/dynamic1.anandtech.com\/www\/delivery\/ck.php?n=a1f2f01f&amp;cb=1526224095\" target=\"_blank\" rel=\"noopener noreferrer\"><img decoding=\"async\" src=\"\" border=\"0\" alt=\"\" \/><\/a><img loading=\"lazy\" decoding=\"async\" src=\"\" height=\"1\" width=\"1\" border=\"0\" alt=\"\" \/><\/p>\n<p>&#013;<br \/>\n&#013;<br \/>\nSource: AnandTech &#8211; <a href=\"https:\/\/www.anandtech.com\/show\/15822\/asml-first-multibeam-inspection-tool-for-5nm\" target=\"_blank\" rel=\"noopener noreferrer\">ASML\u2019s First Multi-Beam Inspection Tool for 5nm<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>ASML has announced it has made a significant development in its multi-beam inspectional tool line. The new eScan1000 moves a single beam scanning process into a nine-beam scanning process, which ASML claims increases the throughput of such tools by up &hellip; <a href=\"https:\/\/www.prime-wow.com\/?p=763032\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":763033,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[93,110],"tags":[94],"class_list":["post-763032","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-anandtech","category-unfiltered-rss","tag-anandtech"],"_links":{"self":[{"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/posts\/763032","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=763032"}],"version-history":[{"count":0,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/posts\/763032\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=\/wp\/v2\/media\/763033"}],"wp:attachment":[{"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=763032"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=763032"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.prime-wow.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=763032"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}